Sustaining Member News

The Evactron Decontaminator from XEI Scientific Cleans Carbon Contamination with Hydrogen

XEI Scientific Inc, maker of the popular EVACTRON? Plasma Cleaning System for electron microscopes and other vacuum chambers, reported the use hydrogen for cleaning carbon decontamination. Using the tool with hydrogen gas has produced atomic hydrogen and has been successful in removing hydrocarbon contamination from EUV mirrors. Cleaning rates were seen in the nanometers-per-minute range at distances of up to 30 cm from the remote plasma source.

XEI Scientific, Inc.